Selecting a proper tool is highly application oriented. Advantages and functions for three different tools, spectroscopic ellipsometer (SE), spectroscopic reflectometer (SR) and Microspectrophotometer (MSP), have been classified on a graph based on measurement speed, spot size, how easy to use, precision, measurable thickness range and cost. In addition, Angstrom Sun Technologies inc delivers several different level software for simulation, data acquisition, regression for thin film application, such as TFProbe 2.x, TFProbe 3.x, DIAS2.x etc.. Please contact us so we can discuss and recommend a suitable tool for your specific applications.